Large field of view with higher resolution has become a strong requirement for the present
measurement technology. Currently used sub-aperture stitching methods are suffering
from the inaccuracies of computer controlled stages. In this work three different simplified
stitching methods are presented. The stitching process proposed here is based on AcoustoOptic Modulator Stroboscopic Interferometry (AOMSI) of fixed field of view (FOV) and it
does not require any computer controlled stage. A large microcantilever was tested in
two stages, one from the root and the other from the tip portions separately, and the complete profile of the cantilever was extracted using the proposed stitching methods. The
same cantilever also was tested using a commercial profilometer with a full field of view.
There was a good agreement between the results from the proposed methods and a commercial profilometer. Obtaining extremely low amount of variation using the presented
stitching methods validates the proposed stitching methods for large microstructures.