Temporal phase shifting interferometry is the most common method for characterization of surface, profile and displacement properties of micro devices. Common methods of phase shifting require piezoelectric material based devices that have inherent errors due to non-linearity. To avoid these errors during phase shifting, a new phase shifting technique is presented in this work. This technique utilizes the advantage of stroboscopic interferometry to create phase shifted images without requiring any additional component for phase shifting. The proposed method was used for surface profiling and static characterization of the microstructures. Static characterization was performed to identify the tip deflection and profile variation of the microcantilever in response to various DC voltages. A capacitor-based cantilever was tested under varied electrostatic loads and the deflection of the cantilever was extracted using the proposed method. The deflection of the cantilever was predicted using energy method. Static characterization results from the proposed technique were found to be in good agreement with the predicted results.
