Finite element method (FEM) analysis is employed for simulation of electrostatic actuation mechanism for micro-tweezers applications. The coupled multiphysical equations including electrostatic, solid mechanic and arbitrary Lagrangian–Eulerian (ALE) are solved for the proposed electrostatic micro-tweezer. It is shown that using shaped interdigitated finger comb drive has stronger electrostatic force for micro-gripping effect. Based on the results, the teeth shaped IDT fingers are of interest for actuation mechanisms such as gripping effect.
