This paper presents a MEMS-based hydrogen sensor that utilizes a cantilever functionalized with palladium. Using rotary electrostatic actuators, the cantilever resonates in in-plane mode which is not complex and compatible with CMOS technology. This sensor works with the lowest viscous damping, and in addition, it is label-free. In the present investigation, solid mechanics module is used for the structural simulation of the sensor. The resulting parameters including oscillation frequency, quality factor, and sensitivity are obtained by the finite element method using 3D simulations. The results show that the quality factor is as high as 1017 at resonance frequency of 305.25 kHz. Moreover, the resonator sensitivity is about 1 Hz/ppm.
